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PECVD Graphite Boat is made of...
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PECVD Graphite Boat is made of high-purity graphite material with low purity, excellent high-temperature stability, and long service life. It is mainly used in solar cell manufacturing and semiconductor manufacturing. Heeger Materials is a professional supplier and manufacturer of high-quality PECVD Graphite Boat, offering competitive prices and customized solutions to meet specific requirements.
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Materials | Graphite |
Size | Customized |
Graphite material has the advantages of high purity, corrosion resistance, super flexural strength, and good electrical conductivity, making it an ideal carrier material in the PECVD process. Graphite Boat is used to carry silicon wafers to generate high-quality anti-reflective coatings and passivation films in the PECVD process. HM can supply high-precision and competitively priced Graphite Boats with tight tolerances according to specific requirements. Various specifications are available for choices.
Density | Resistivity | Compressive Strength | Bending Strength | The Coefficient of Thermal Expansion (CTE) | Ash | Grain Size |
g/cm3 | μΩm | Mpa | Mpa |
| % | μm |
1.80 | 10 | 55 | 30 | 4.5 | 0.1 | 45 |
1.85 | 9 | 62 | 35 | 5.5 | 0.1 | 45 |
Type | Specifications | Note |
| 13 pieces |
|
15 pieces | ||
17 pieces | ||
19 pieces |
125 Type(125mm*125mm) | 125 Graphite Boat Side Sheet | |
125 Graphite Boat Center Sheet | ||
156 Type(156mm*156mm) | 156 Graphite Boat Side Sheet | |
156 Graphite Boat Center Sheet | ||
Graphite Screw | M6*215 | High-purity graphite |
M6*190 | ||
M6*275 | ||
M8*215 | ||
M8*190 | ||
M8*160 | ||
M8*245 | ||
Graphite Nut, Graphite Cap Nut | M6, M8 |
Graphite boats are used to carry silicon wafers to generate high-quality anti-reflective coatings and passivation films during the PECVD process in the following applications:
Heeger Materials Inc., a professional supplier and manufacturer of high-quality Graphite products, including PECVD Graphite Boat, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.
Heeger Materials Inc. was established in 2016 in Colorado, USA. We are a specialized supplier of premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.
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