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PECVD Graphite Boat

New product

PECVD Graphite Boat is made of high-purity graphite material with low purity, excellent high-temperature stability, and long service life. It is mainly used in solar cell manufacturing and semiconductor manufacturing. Heeger Materials is a professional supplier and manufacturer of high-quality PECVD Graphite Boat, offering competitive prices and customized solutions to meet specific requirements.

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Data sheet

MaterialsGraphite
SizeCustomized

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Graphite material has the advantages of high purity, corrosion resistance, super flexural strength, and good electrical conductivity, making it an ideal carrier material in the PECVD process. Graphite Boat is used to carry silicon wafers to generate high-quality anti-reflective coatings and passivation films in the PECVD process. HM can supply high-precision and competitively priced Graphite Boats with tight tolerances according to specific requirements. Various specifications are available for choices.

PECVD Graphite Boat

Graphite Boat Technical Parameter

Density

Resistivity

Compressive Strength

Bending Strength

The Coefficient of Thermal Expansion (CTE)

Ash

Grain Size

g/cm3

μΩm

Mpa

Mpa

 

%

μm

1.80

10

55

30

4.5

0.1

45

1.85

9

62

35

5.5

0.1

45

Graphite Boat Specifications

Type

Specifications

Note

  • 125mm*125mm
  • 156mm*156mm
  • Monocrystal/Polycrystal

13 pieces

  • High-purity graphite
  • Applied in PECVD equipment.

15 pieces

17 pieces

19 pieces

Graphite Boat Accessories

125 Type(125mm*125mm)

125 Graphite Boat Side Sheet

125 Graphite Boat Center Sheet

156 Type(156mm*156mm)

156 Graphite Boat Side Sheet

156 Graphite Boat Center Sheet

Graphite Screw

M6*215

High-purity graphite

M6*190

M6*275

M8*215

M8*190

M8*160

M8*245

Graphite Nut, Graphite Cap Nut

M6, M8

Graphite Boat Advantages

  • Precision machining equipment is used to ensure the accuracy of each part.
  • Graphite Boat is made of a high-purity graphite material with low impurity content, high strength, and no deformation when used under high temperatures for a long time.
  • Graphite Boat has adopted the technology of eliminating “color lenses” to ensure that no “color lenses” appear in the long-term process.

Graphite Boat Applications

Graphite boats are used to carry silicon wafers to generate high-quality anti-reflective coatings and passivation films during the PECVD process in the following applications:

  • Solar cell manufacturing
  • Semiconductor manufacturing

Where to Buy PECVD Graphite Boat in Bulk?

Heeger Materials Inc., a professional supplier and manufacturer of high-quality Graphite products, including PECVD Graphite Boat, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.

Heeger Materials Inc. was established in 2016 in Colorado, USA. We are a specialized supplier of premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.

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