Viewed products

Silicon Carbide Trays | SiC Trays

New product

Silicon Carbide (SiC) Trays are commonly used in the ICP etching process, exhibiting high hardness, abrasion resistance, high thermal conductivity, corrosion resistance, etc. Heeger Materials is a professional supplier and manufacturer of high-quality Silicon Carbide (SiC) Trays, offering competitive prices and customized solutions to meet specific requirements.

More details

Inquiry

Please contact us if you need customized services. We will contact you with the price and availability in 24 hours.

Data sheet

ColorBlack
Density3.2 g/cm3
MaterialsSiC
SizeCustomized

More info

Silicon Carbide (SiC) Trays are made of high-purity silicon carbide materials, possessing the advantages of high hardness, abrasion resistance, high thermal conductivity, stable mechanical properties at high temperatures, corrosion resistance, etc. They can ensure good uniformity of wafer epitaxial layer etching. According to specific drawings, HM can supply high-precision and competitively priced Silicon Carbide (SiC) Trays with tight tolerances. Various specifications are available for choices.

Silicon Carbide Trays | SiC TraysSilicon Carbide Trays | SiC Trays

Silicon Carbide (SiC) Material Properties Parameter

Material

HM-RBSiC

HM-SSiC

Reaction Bonded Silicon Carbide

Sintered Silicon Carbide

Density

3.2 g/cm³

3.2 g/cm³

Absorption Rate

0

0

Color

Black

Black

Overview of Features

High stiffness
Variable resistivity
Strong mechanical properties
Lightweight

Mechanical Properties

Vickers Hardness

22 GPa

23 GPa

Flexural Strength (20°C)

450 MPa

540 MPa

Young's Modulus

430 GPa

440 GPa

Poisson's Ratio

0.16

0.17

Fracture Toughness

4 - 5 MPa·m¹/₂

4 - 5 MPa·m¹/₂

Thermal Properties

Coefficient of Thermal Expansion (40-800°C)

3.7 - 4.4 × 10⁻⁶ /°C

3.7 - 4.4 × 10⁻⁶ /°C

Thermal Conductivity (20°C)

60 W/(m·K)

140 W/(m·K)

Specific Heat Capacity

0.67 J/(g·K)

0.67 J/(g·K)

Electrical Properties

Volume Resistivity (20°C)

-

10⁵ Ω·cm

Volume Resistivity (300°C)

-

10⁴ Ω·cm

Silicon Carbide (SiC) Trays Advantages

  • Excellent Hardness and Wear Resistance
  • High compressive strength
  • Low coefficient of friction and thermal stability
  • Thermal Shock Stability
  • Chemical Stability

Silicon Carbide (SiC) Trays Applications

  • Silicon Carbide trays are widely used in the ICP etching process for epitaxial layer thin film materials (GaN, SiO2, etc.) for LED wafer chips.
  • Silicon Carbide trays can also be used in the MOCVD epitaxial process for semiconductor wafers and precision ceramic parts for semiconductor diffusion.

Where to Buy Silicon Carbide (SiC) Trays in Bulk?

Heeger Materials Inc., a professional supplier and manufacturer of high-quality Silicon Carbide Ceramic products, including Silicon Carbide (SiC) Trays, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.

Heeger Materials Inc. was established in 2016 in Colorado, USA. We are a specialized supplier of premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.

Inquiry to Heeger Materials

Items marked with an asterisk (*) are required.
Please include item quantity, size and purity.
Privacy Information:

Heeger Materials respects your privacy, and we will NOT sell or provide your personal data to other third parties, or allow them to use your personal data for their own purposes. However, we would like to send you information from time to time by mail or email about our products and special offers in addition to the interest categories you've selected above. Read our Privacy Policy

16 other products in the same category: