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Target Bonding Service

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Elastomer Bonding

HTST1188

New product

Elastomer is an alternative bonding method that touts a higher temperature capability over the indium bond. Elastomer bonds are recommended when customers are consistently melting indium bonds. The major advantages of Elastomer bonding are its low cure temperature (reducing internal bond stresses from thermal mismatch) and high operation temperature (250 °C).

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Elastomer Bonding Advantages

  • Low cure temperature
  • High operation temperature (250 °C)
  • Larger dimensions of the sputtering target and backing plate

Elastomer bonding Specifications

Maximum Operating Temperature (°C)

250 ° C

Thermal Conductivity (W/mK)

54

Coefficient of Thermal Expansion (K-1)

2.2 x 10-4

Electrical Resistivity (ohm-cm)

0.0476

Bond Coverage

>98%

Bond Line Thickness

0.010” – 0.025”

Elastomer Bonding Targets

We highly recommend using elastic binding for the following target materials. The elastic binding provides improved adhesion and uniformity during deposition processes, ensuring better performance and consistency in the final coating. This method allows for more precise control over material properties, reducing the risk of cracking or delamination, especially under high-stress or temperature conditions. It is particularly beneficial for applications requiring long-term durability and reliability.

Aluminum Nitride Sputtering Target

Barium Strontium Titanate AKA BST (Ba0.5Sr0.5TiO3) Sputtering Target

Barium Titanate (BaTiO3) Sputtering Target

Bismuth (Bi) Sputtering Target

Cobalt Oxide (CoO) Sputtering Target

Indium (In) Sputtering Target

Lithium (Li) Sputtering Target

Lithium Orthophosphate (Li3PO4) Sputtering Target

Manganese (Mn) Sputtering Target

Selenium (Se) Sputtering Target

Strontium Titanate (SrTiO3) Sputtering Target

Tin Oxide (SnO2) Sputtering Target

Other Target Bonding Methods

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