AlScN Film Template on Sapphire

Data sheet

Diameter	2 inch, 4 inch, 6 inch
Thick	800 nm

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The Aluminum Scandium Nitride (AlScN) Film Template on Sapphire offers world-leading quality with a range of film thicknesses, available in sizes of 2", 4", and 6". This high-performance template serves as an ideal substrate for 5G RF front-end SAW/BAW filters, MEMS piezoelectric sensors, and various high-power and high-frequency electronic devices. With the exceptional properties of AlScN, including enhanced piezoelectric characteristics and superior thermal conductivity, it is perfectly suited for the most demanding applications in advanced technology fields. Heeger Materials (HM) ensures consistently high quality and reliability for your specialized requirements. Furthermore, we offer Aluminum Nitride (AlN) Ceramic Substrate to fulfill particular needs.
Aluminum Scandium Nitride Film Template On Sapphire | AlScN

AlScN Film Template On Sapphire Specifications

Specification Parameters	Parameter Values
Diameter (inch)	2	4	6
Substrate	Sapphire C - plane
Substrate Thickness (μm)	430±15	650±20	1300±20
Sc Concentration (at%)	40±5
AlScN Epitaxial Layer Thickness (nm)	800
Crystal Orientation	C - axis [0001] +/ - 0.2°
Effective Area	≥95%
Cracks	None
HRXRD FWHM @(0002)	≤120
Surface Roughness Ra [5×5μm] (nm)	≤10
Total Thickness Variation (μm)	≤10	≤20	≤20
Warpage (μm)	≤20	≤40	≤60
Bending (μm)	≤20	≤40	≤60
Packaging	Single-piece/Multi-piece Wafer Cassette

AlScN Film Template On Sapphire Partial Characterization Results

1. 0002 X-ray Rocking Curves: 2. AlScN Film Template On Sapphire AFM Morphology:

X-ray rocking curves of AlScN Film Template On Sapphire in the 0002 reflection

AlScN Film Template On Sapphire Applications

5G RF Front-End SAW/BAW Filters: Ideal for 5G SAW/BAW filters, offering high acoustic wave velocity and exceptional piezoelectric properties for stable, high-frequency performance.
MEMS Piezoelectric Sensors: With enhanced piezoelectric coefficients, perfect for MEMS sensors, offering high sensitivity to pressure, temperature, and stress for accurate sensing.
High-Power and High-Frequency Electronics: Provides superior thermal and mechanical stability for high-power and high-frequency electronics, compatible with silicon-based CMOS technologies.
Advanced 5G RF Communication Systems: Essential for 5G RF components, supporting high-performance devices and efficient signal transmission in wireless networks.
Next-Generation Electronic and Optoelectronic Devices: Offers a stable substrate for advanced sensors, high-power semiconductors, and optoelectronic devices, enabling innovations across multiple industries.

Where to Buy AlScN Film Template On Sapphire in Bulk?

Heeger Materials Inc., a professional supplier and manufacturer of high-quality Aluminum Nitride (AlN) products, including Aluminum Scandium Nitride Film Template On Sapphire, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.

Heeger Materials Inc. was established in 2016 in Colorado, USA. We specialize in premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.

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