AlScN Film Template on Silicon

Data sheet

Diameter	4 inch, 6 inch, 8 inch
Thick	800 nm

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Aluminum Scandium Nitride (AlScN) Film Template on Silicon is a high-quality material designed for advanced electronic applications. Available in sizes 4", 6", and 8", it is optimized for use in 5G RF front-end SAW/BAW filters, MEMS piezoelectric sensors, and a variety of high-power, high-frequency electronic devices. The template's enhanced properties, including high thermal stability and mechanical robustness, make it an ideal substrate for next-generation technology. Heeger Materials (HM) provides custom specifications to meet the unique needs of clients, ensuring reliable performance and precision in advanced applications. Furthermore, we offer Aluminum Nitride (AlN) Ceramic Substrate to fulfill particular requirements.
Aluminum Scandium Nitride Film Template On Silicon | AlScN

AlScN Film Template On Silicon Specifications

Specification Parameters	Parameter Values
Diameter (inch)	4	6	8
Substrate	Silicon (100) plane
Substrate Thickness (μm)	525±20	625±15	725±15
Sc Concentration (at%)	40±5
Doping Type	N/P
Resistivity (Ω)	>5000
AlScN Epitaxial Layer Thickness (nm)	800
Crystal Orientation	C - axis [0001]±0.2°
Effective Area	≥95%
Cracks	None
HRXRD FWHM @(0002)	≤2°
Surface Roughness Ra [5×5μm] (nm)	≤5
Total Thickness Variation (μm)	≤10	≤5	≤4
Warpage (μm)	≤25	≤40	≤40
Bending (μm)	≤25	≤40	≤40
Packaging	Single-piece/Multi-piece Wafer Cassette
Note	The test results of all the above parameters may vary slightly depending on the actual testing equipment or software used

AlScN Film Template On Silicon Partial Characterization Results

1. 0002 XRD Rocking Curves: 2. AFM Images Of AiScN Template On Silicon:

XRD rocking curves measured with symmetric (0002) reflection AFM images of Si-based AiScN templates

AlScN Film Template On Silicon Applications

5G RF Filters: Perfect for 5G RF front-end SAW/BAW filters, providing excellent frequency stability and performance.
MEMS Sensors: Ideal for MEMS piezoelectric sensors that exhibit high sensitivity to pressure, temperature, and stress.
High-Power Electronics: Provides exceptional mechanical and thermal stability for devices operating at high power and high frequency.
Acoustic Instruments: Utilized in advanced acoustic instruments such as resonators, sensors, and transducers.
Optoelectronics & Semiconductors: Acts as a dependable base for next-generation optoelectronic and semiconductor technologies.

Where to Buy AlScN Film Template On Silicon in Bulk?

Heeger Materials Inc., a professional supplier and manufacturer of high-quality Aluminum Nitride (AlN) products, including Aluminum Scandium Nitride Film Template On Silicon, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.

Heeger Materials Inc. was established in 2016 in Colorado, USA. We specialize in premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.

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