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New Aluminum Nitride Film Template On Silicon | 4"/6"-Heeger Materials Inc View larger

Aluminum Nitride Film Template On Silicon | 4"/6"

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Aluminum Nitride (AlN) Film Template on Silicon offers excellent thermal conductivity and is ideal for UVC-LEDs, UV detectors, and semiconductors. Available in 4" and 6" sizes, it provides a stable platform for high-quality Aluminum Nitride films. Heeger Materials (HM) ensures consistent quality for optimal performance.

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Data sheet

Diameter4 inch, 6 inch, 8 inch
Thick200/400/500/600/800 or customized
Density3.23 g/cc
Melting Piont2750 ℃ (under 10-100 bar of Nitrogen)

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Aluminum Nitride (AlN) Film Template on Silicon provides a high-quality substrate with exceptional thermal conductivity and mechanical strength, making it perfect for advanced applications in optoelectronics and power electronics. Available in 4" and 6" sizes, this template serves as a reliable platform for growing Aluminum Nitride films, offering excellent performance for devices like UVC-LEDs, UV detectors, and semiconductor components. Its superior heat dissipation and material properties ensure enhanced efficiency and longevity in high-performance applications. Heeger Materials (HM) guarantees consistent quality, delivering reliable solutions for your specialized needs. Furthermore, we offer Aluminum Nitride (AlN) Ceramic Substrate to fulfill particular requirements.

Aluminum Nitride Film Template On Silicon | 4"/6"

AlN Film Template On Silicon Specifications

Specification ParametersParameter Values

Substrate

Silicon single crystal wafer (100) plane

Doping Type

N/P

Resistivity (Ω)

>5000

AIN Epitaxial Layer Crystal Structure

Wurtzite

Diameter (inch)

4

6

8

Substrate Thickness (μm)

525 ± 20

625 ± 15

725 ± 15

AIN Epitaxial Layer Thickness (nm)

200/400/500/600/800 or customized, the parameters in this table are based on 500nm

Crystal Orientation

C-axis [0001] ±/- 0.2°

Effective Area

≥95%

Cracks

None

XRD Powder FWHM @(0002)

≤0.2°

HRXRD FWHM @(0002)

≤1.55°

Surface Roughness [5×5μm] (nm)

≤2.0

Total Thickness Variation (μm)

≤10

≤5

≤4

Warpage (μm)

≤25

≤40

≤40

Bending (μm)

≤25

≤40

≤40

Packaging

Single wafer cassette/Multiple wafer cassette

Note

The above parameter values may vary slightly depending on the actual testing equipment or software used

AlN Film Template on Silicon Partial Characterization Results

Example With An AlN Film Thickness of 200nm:

1. Powder XRD and Full Width at Half Maximum (FWHM):

Powder XRD and Full Width at Half Maximum (FWHM)

2. HDXRD and Full Width at Half Maximum (FWHM):

HDXRD and Full Width at Half Maximum (FWHM)

3. Silicon-Based Aluminum Nitride Template AFM Morphology:

    Silicon-Based Aluminum Nitride Template AFM Morphology

Aluminum Nitride Crystal Structure

Aluminum Nitride Crystal Structure                      Aluminum Nitride Crystal Structure

Aluminum Nitride Material Physical Property Parameters 

Common Parameters

Parameter Values

Crystal Structure

Wurtzite - type

Lattice Constant (Å)

a=3.112, c=4.982

Conduction Band Type

Direct Bandgap

Crystal Density (g/cm³)

3.23

Knoop Hardness of the Surface

800

Melting Point (°C)

2750 (under 10 - 100 bar of nitrogen)

Thermal Conductivity (W/m·K)

320

Bandgap (eV)

6.28

Electron Mobility (V·s/cm²)

1100

Breakdown Field Strength (MV/cm)

11.7

Sound Velocity (m/s)

11300

AlN Film Template on Silicon Applications

  • UVC-LED and Ultraviolet Detectors: Aluminum Nitride (AlN) Film Templates on Silicon are ideal for UVC-LEDs and ultraviolet detectors, offering high thermal conductivity and superior mechanical properties to ensure efficient light emission and high sensitivity in detection.
  • 5G Wireless Communication Devices: With its exceptional heat dissipation and stability, this template is perfect for high-performance 5G communication components such as SAW (Surface Acoustic Wave) and BAW (Bulk Acoustic Wave) devices, supporting reliable signal transmission and performance.
  • Power Electronics and RF Devices: The AlN film template is widely used in power electronics and radio-frequency (RF) devices, where its high thermal conductivity is critical for managing heat in high-power and high-frequency applications, ensuring the longevity and efficiency of the devices.
  • UV Purification and Sterilization: AlN templates are also used in UV-C purification and sterilization systems, playing a crucial role in applications such as water treatment, air sterilization, surface disinfection, and odor removal, contributing to environmental and public health.
  • Advanced Medical and Biotech Applications: These templates are applied in medical light therapy, drug research, secure communication technologies, and ultraviolet-based space exploration, providing reliable substrates for cutting-edge research and development in health, security, and scientific exploration.

Where to Buy Aluminum Nitride Film Template on Silicon in Bulk?

Heeger Materials Inc., a professional supplier and manufacturer of high-quality Aluminum Nitride (AlN) products, including Aluminum Nitride Film Template on Silicon, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.

Heeger Materials Inc. was established in 2016 in Colorado, USA. We specialize in premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.

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