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Aluminum Nitride Ceramic materials...
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Aluminum Nitride Ceramic materials have excellent electrical insulation and thermal conductivity. Heeger Materials can provide the best quality and customized Aluminum Nitride (AlN) Ceramic Ball at a competitive price. The regular diameter is 5mm or could be tailored to meet specific requirements.
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Shape | Ball |
Materials | AlN |
Size | ~5 mm, or customized |
Aluminum Nitride Ceramic, with a coefficient of thermal expansion close to that of silicon and excellent plasma resistance, is used in the manufacture of semiconductor processing equipment components.
Item | Unit | Test Standard |
Density | g/cm3 | ≥3.30 |
Melting Point | ℃ | 2500 |
Thermal Conductivity | 25℃ W/(m.k) | ≥170 |
Dielectric Constant | 1 MHz, 25℃ | 9 |
Dielectric Loss | 1 MHz, 25℃ | 4.6×10-4 |
Dielectric Strength | Kv/mm | ≥15 |
Flexural Strength | Mpa | ≥350 |
Elastic Modulus | GPa | 310-320 |
Warpage | ~/25(length) | 0.002-0.005 |
Surface roughness | um |
|
Coefficient of thermal expansion | 20~300℃ (10-6/℃) | 4.6 |
Volume resistivity | 20℃.Ω.cm | 1.5×1014 |
Water Absorption | % | 0 |
Aluminum Nitride (AlN) Ceramic Ball is carefully packaged with adhesive-free surface protection tape and cardboard boxes to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.
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