Fused Quartz Wafer

Data sheet

Diameter	Maximum φ200 mm, or customised
Materials	SiO2

More info

Fused Quartz Wafer is a high-purity material with excellent optical transparency, thermal resistance, and chemical stability, widely used in semiconductor fabrication, photonics, and precision optics. UV-grade wafers, including JGS1, Corning 7980, and SK1300, offer superior deep UV transparency, while IR-grade wafers, such as JGS3, Corning 7979, and SK1310, feature low hydroxyl (OH) content for infrared applications. These wafers are available in diameters up to 8 inches (200 mm) with a surface roughness (Ra) of less than 0.5 nm, ensuring high precision and minimal defects. In addition to wafers, we also offer Quartz Glass Wafer for advanced optical and electronic applications. Heeger Materials provides high-quality Fused Quartz Wafers to support research and industrial needs.

Fused Quartz Wafer

Fused Quartz Wafer Specifications

Parameter	JGS1	JGS3
Maximum Size	<Φ250mm	<Φ200mm
Transmission Range	0.17–2.10 μm	0.25–3.50 μm
Medium Transmission Ratio	Tavg > 90%	Tavg > 85%
OH⁻ Content	1200 ppm	5 ppm
Fluorescence (ex 254nm)	Virtually Free	Strong (v-b)
Impurity Content	5 ppm	40–50 ppm
Birefringence Constant	2–4 nm/cm	4–10 nm/cm
Melting Method	Synthetic CVD	Electrical Melting
Applications	Laser substrates: Window, lens, prism, mirror, etc.	IR Substrates

Fused Quartz Wafer Stock Dimensions

Specification (Unit)	4"	6"	8"	10"	12"
Diameter (mm)/Size(or square)	100	150	200	250	300
Tolerance (mm)	±0.2	±0.2	±0.2	±0.2	±0.2
Thickness (mm)	≥0.10	≥0.30	≥0.40	≥0.50	≥0.50
Primary Flat (mm)	32.5	57.5	Semi-notch	Semi-notch	Semi-notch
Local Thickness Variation (LTV, 5mm×5mm, µm)	<0.5	<0.5	<0.5	<0.5	<0.5
Total Thickness Variation (TTV, µm)	<2	<3	<3	<5	<5
Bow (µm)	±20	±30	±40	±40	±40
Warp (µm)	≤30	≤40	≤50	≤50	≤50
PLTV (5mm×5mm, <0.4µm, %)	≥95%	≥95%	≥95%	≥95%	≥95%
Edge Rounding (mm)	Complies with SEMI M1.2 standard or IEC62276 reference
Surface Type	Single-side polished or double-side polished
Polished Surface Roughness (Ra, nm)	≤1
Backside Standard (µm)	Typically 0.2-0.7, or customizable as needed

Note: In addition to our Stock Modes, Heeger Materials provides customized services to meet your needs.

Fused Quartz Wafer Transmittance Curves

Ultraviolet Grade Fused Silica (JGS1) Full Spectrum Fused Silica (JGS3)

Fused Quartz Wafer Applications

Semiconductor Processing: Used as a substrate in photomask manufacturing and etching processes due to its high purity and thermal stability.
Optical Components: Ideal for lenses, windows, and beam splitters in deep UV and infrared optical systems.
Laser and Lithography Systems: UV-grade fused quartz is essential for excimer laser optics and photolithography applications.
Aerospace and Defense: Utilized in precision optics and infrared sensors for high-performance imaging systems.
Scientific Research: Applied in spectroscopy, high-temperature experiments, and advanced photonic devices requiring low impurity levels.

Fused Quartz Wafer Packing And Shipping

Fused Quartz Wafer will be securely packaged in sturdy containers with cushioning materials to prevent movement or damage during shipping. This careful packaging ensures that the product arrives in perfect condition, maintaining its high-quality standards throughout delivery.

Where to Buy Fused Quartz Wafers in Bulk?

Heeger Materials Inc., a professional supplier and manufacturer of high-quality Conductive Glass Substrates products including Fused Quartz Wafer, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.

Heeger Materials Inc. was established in 2016 in Colorado, USA. We specialize in premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.

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