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Quartz Glass Wafer offers high...
HM2866
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Quartz Glass Wafer offers high purity, excellent thermal stability, and outstanding electrical insulation, making it a key material in semiconductor manufacturing. With superior transparency in UV and IR spectra, it is widely used in lithography, etching masks, and optical components.
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Diameter | 2 inch ~ 12 inch, or customized |
Thick | ≥100 μm |
Shape | Round or Square |
Materials | SiO2 |
Quartz Glass Wafer is an essential material in the semiconductor industry, known for its high purity, thermal stability, and excellent electrical insulation. As an amorphous form of SiO2, it is ideal for high-temperature processes such as chemical vapor deposition (CVD) and epitaxial growth. Its exceptional transparency in UV and IR spectra makes it suitable for lithography, etching masks, and optical applications. Additionally, its low absorption and high damage threshold make it valuable for precision laser processing. We offer Quartz Glass Wafers in various diameters from 2 inches to 12 inches, with customizable thicknesses down to 100 microns. Advanced surface inspection tools, including optical profilers and wafer defect detection systems, ensure top-quality standards. Heeger Materials provides high-quality Quartz Glass Wafers to meet diverse industry needs.
Parameter | JGS2 |
---|---|
Maximum Size | <Φ300mm |
Transmission Range | 0.26–2.10 μm |
Medium Transmission Ratio | Tavg > 85% |
OH⁻ Content | 150 ppm |
Fluorescence (ex 254nm) | Strong v-b |
Impurity Content | 20–40 ppm |
Birefringence Constant | 4–6 nm/cm |
Melting Method | Oxy-hydrogen melting |
Applications | Semiconductor and high-temperature windows |
Specification (Unit) | 4" | 6" | 8" | 10" | 12" |
Diameter (mm)/Size(or square) | 100 | 150 | 200 | 250 | 300 |
Tolerance (mm) | ±0.2 | ±0.2 | ±0.2 | ±0.2 | ±0.2 |
Thickness (mm) | ≥0.10 | ≥0.30 | ≥0.40 | ≥0.50 | ≥0.50 |
Primary Flat (mm) | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
Local Thickness Variation (LTV, 5mm×5mm, µm) | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 |
Total Thickness Variation (TTV, µm) | <2 | <3 | <3 | <5 | <5 |
Bow (µm) | ±20 | ±30 | ±40 | ±40 | ±40 |
Warp (µm) | ≤30 | ≤40 | ≤50 | ≤50 | ≤50 |
PLTV (5mm×5mm, <0.4µm, %) | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
Edge Rounding (mm) | Complies with SEMI M1.2 standard or IEC62276 reference | ||||
Surface Type | Single-side polished or double-side polished | ||||
Polished Surface Roughness (Ra, nm) | ≤1 | ||||
Backside Standard (µm) | Typically 0.2-0.7, or customizable as needed |
Note: In addition to our Stock Modes, Heeger Materials provides customized services to meet your needs.
Optical Grade Fused Quartz (JGS2)
Quartz Glass Wafer will be securely packaged in sturdy containers with cushioning materials to prevent movement or damage during shipping. This careful packaging ensures that the product arrives in perfect condition, maintaining its high-quality standards throughout delivery.
Heeger Materials Inc., a professional supplier and manufacturer of high-quality Conductive Glass Substrates products including Quartz Glass Wafer, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.
Heeger Materials Inc. was established in 2016 in Colorado, USA. We specialize in premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.
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