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New Quartz Glass Wafer-Heeger Materials Inc View larger

Quartz Glass Wafer

HM2866

New product

Quartz Glass Wafer offers high purity, excellent thermal stability, and outstanding electrical insulation, making it a key material in semiconductor manufacturing. With superior transparency in UV and IR spectra, it is widely used in lithography, etching masks, and optical components.

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Data sheet

Diameter2 inch ~ 12 inch, or customized
Thick≥100 μm
ShapeRound or Square
MaterialsSiO2

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Quartz Glass Wafer is an essential material in the semiconductor industry, known for its high purity, thermal stability, and excellent electrical insulation. As an amorphous form of SiO2, it is ideal for high-temperature processes such as chemical vapor deposition (CVD) and epitaxial growth. Its exceptional transparency in UV and IR spectra makes it suitable for lithography, etching masks, and optical applications. Additionally, its low absorption and high damage threshold make it valuable for precision laser processing. We offer Quartz Glass Wafers in various diameters from 2 inches to 12 inches, with customizable thicknesses down to 100 microns. Advanced surface inspection tools, including optical profilers and wafer defect detection systems, ensure top-quality standards. Heeger Materials provides high-quality Quartz Glass Wafers to meet diverse industry needs.

Quartz Glass Wafer

Quartz Glass Wafer Specifications

ParameterJGS2
Maximum Size<Φ300mm
Transmission Range0.26–2.10 μm
Medium Transmission RatioTavg > 85%
OH⁻ Content150 ppm
Fluorescence (ex 254nm)Strong v-b
Impurity Content20–40 ppm
Birefringence Constant4–6 nm/cm
Melting MethodOxy-hydrogen melting
ApplicationsSemiconductor and high-temperature windows

Quartz Glass Wafer Stock Dimensions

Specification (Unit)

4"

6"

8"

10"

12"

Diameter (mm)/Size(or square)

100

150

200

250

300

Tolerance (mm)

±0.2

±0.2

±0.2

±0.2

±0.2

Thickness (mm)

≥0.10

≥0.30

≥0.40

≥0.50

≥0.50

Primary Flat (mm)

32.5

57.5

Semi-notch

Semi-notch

Semi-notch

Local Thickness Variation (LTV, 5mm×5mm, µm)

<0.5

<0.5

<0.5

<0.5

<0.5

Total Thickness Variation (TTV, µm)

<2

<3

<3

<5

<5

Bow (µm)

±20

±30

±40

±40

±40

Warp (µm)

≤30

≤40

≤50

≤50

≤50

PLTV (5mm×5mm, <0.4µm, %)

≥95%

≥95%

≥95%

≥95%

≥95%

Edge Rounding (mm)

Complies with SEMI M1.2 standard or IEC62276 reference

Surface Type

Single-side polished or double-side polished

Polished Surface Roughness (Ra, nm)

≤1

Backside Standard (µm)

Typically 0.2-0.7, or customizable as needed

Note: In addition to our Stock Modes, Heeger Materials provides customized services to meet your needs.

Quartz Glass Wafer Transmittance Curve

Quartz Glass Wafer Transmittance Curve     

                        Optical Grade Fused Quartz (JGS2)

Quartz Glass Wafer Applications

  • Semiconductor Manufacturing: Used as a substrate for chemical vapor deposition (CVD), epitaxial growth, and other high-temperature processes.
  • Photolithography and Etching Masks: Provides high UV transparency for precise pattern transfer in microfabrication.
  • Optical Components: Utilized in lenses, windows, and filters due to its excellent UV and IR transmission.
  • Laser Applications: Ideal for laser optics and precision laser processing due to its low absorption and high damage threshold.
  • Medical and Scientific Instruments: Used in analytical equipment and laboratory optics for its chemical stability and optical clarity.

Quartz Glass Wafer Packing And Shipping

Quartz Glass Wafer will be securely packaged in sturdy containers with cushioning materials to prevent movement or damage during shipping. This careful packaging ensures that the product arrives in perfect condition, maintaining its high-quality standards throughout delivery.

Quartz Glass Wafer Packing

Where to Buy Quartz Glass Wafer in Bulk?

Heeger Materials Inc., a professional supplier and manufacturer of high-quality Conductive Glass Substrates products including Quartz Glass Wafer, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.

Heeger Materials Inc. was established in 2016 in Colorado, USA. We specialize in premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors. 

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