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Silicon Carbide Single Crystal Substrate | 6H-SiC/4H-SiC

HM2866

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Silicon Carbide (SiC) Single Crystal Substrate is used in high-power electronics, radio frequency devices, and optoelectronic applications. Heeger Materials is a professional supplier and manufacturer of high-quality Silicon Carbide Single Crystal Substrate, offering customized solutions and competitive prices.

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Data sheet

Density3.21 g/cm³
MaterialsSiC Substrate

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Silicon Carbide (SiC) Single Crystal Substrate is widely used in high-power electronic devices, RF applications, and optoelectronics due to its excellent thermal conductivity, wide bandgap, and high breakdown voltage. 6H-SiC and 4H-SiC differ in their crystal structures, affecting their electrical properties—4H-SiC offers higher electron mobility, making it ideal for high-frequency and power-switching applications, while 6H-SiC provides a balance of electrical and mechanical properties for diverse uses. In addition to standard conductive substrates, we also provide Semi-insulated SiC Substrate and N-type SiC Substrate for specialized applications. Heeger Materials offers high-quality Silicon Carbide Single Crystal Substrate to meet various industrial and research demands.

Silicon Carbide Single Crystal Substrate | 6H-SiC/4H-SiC

Silicon Carbide Single Crystal Substrate Specifications

Growth MethodSeeded Sublimation Method, PVT (Physical Vapor Transport)
Crystal StructureHexagonal
Lattice Constantsa = 3.08 Å, c = 15.08 Å
Density3.21 g/cm³
OrientationGrowth axis or off <0001> by 3.5º
Bandgap3.26 eV (Indirect)
Hardness9.2 (Mohs)
Thermal Conductivity @300K5 W/cm·K
Dielectric Constantε(11) = ε(22) = 9.66, ε(33) = 10.33
Dimensions10×3mm, 10×5mm, 10×10mm, 15×15mm, 20×15mm, 20×20mm, Dia50.8mm, Dia76.2mm, Dia101.6mm
Thickness0.35mm
PolishingSingle-side or double-side polished
Crystal Orientation<0001> ±0.5º
Crystal Orientation Accuracy±0.5°
Edge Orientation Accuracy2° (Special requirements can be reached within 1°)
Off-Cut WafersWafers with edges inclined at specific angles (tilt range: 1°–45°) can be customized as required.
Ra (Surface Roughness)≤5Å (5µm×5µm)

Semi-insulated SiC Substrate Specifications

Parameter

Production Grade

Research Grade

Dummy Grade

Grade

Production

Research

Dummy

Polytype/Surface Orientation

On-axis/Off-axis

4H/<0001>/0±0.25°

FWHM

≤45 arcsec

≤60 arcsec

≤100 arcsec

Diameter/Thickness/Notch

200±0.2mm / 500±25μm / [1-100] ±5° / 1~1.5mm / Ra ≤0.2nm

Resistivity

≥1E8 Ω•cm

100% area >1E5 Ω•cm

70% area >1E5 Ω•cm

LTV (10mm×10mm)

≤5μm

≤10μm

≤15μm

TTV

≤10μm

≤15μm

≤20μm

Bow

-25μm ~ 25μm

-45μm ~ 45μm

-65μm ~ 65μm

Warp

≤35μm

≤50μm

≤70μm

Micropipe Density

≤2 ea/cm²

≤10 ea/cm²

≤50 ea/cm²

Metal Impurities

≤5E12 atoms/cm²

N/A

N-Type SiC Substrate Specifications

Parameter

Production Grade

Grade

Production

Research

Dummy

Polytype/Surface Orientation Tolerance

4H / 4° toward <11-20> ±0.5°

Type/Dopant

N-type / Nitrogen

Diameter/Thickness/Notch

200±0.2mm / 500±25μm / [1-100] ±5° / 1~1.5mm / Ra ≤0.2nm

Resistivity (Ω·cm)

0.015~0.025

0.01~0.03

N/A

LTV (10mm×10mm)

≤5μm

≤10μm

≤15μm

TTV

≤10μm

≤15μm

≤20μm

Bow

-25μm ~ 25μm

-45μm ~ 45μm

-65μm ~ 65μm

Warp

≤35μm

≤50μm

≤70μm

Micropipe Density

≤2 ea/cm²

≤10 ea/cm²

≤50 ea/cm²

Metal Impurities

≤5E12 atoms/cm²

N/A

TSD

≤500 ea/cm²

≤1000 ea/cm²

N/A

BPD

≤2000 ea/cm²

≤5000 ea/cm²

N/A

TED

≤7000 ea/cm²

≤10000 ea/cm²

N/A

Silicon Carbide Single Crystal Substrate Applications

  • High-Power Electronics: Used in power semiconductor devices like MOSFETs and Schottky diodes, enabling efficient energy conversion with lower power losses.
  • Radio Frequency (RF) Devices: Essential for high-frequency and high-power RF components in wireless communication, radar, and satellite systems.
  • Optoelectronics: Applied in LEDs, laser diodes, and UV photodetectors, benefiting from its wide bandgap and high thermal conductivity.
  • Electric Vehicles (EVs) and Renewable Energy: Supports the development of efficient inverters and power modules for EVs, solar power, and wind energy systems.
  • Aerospace and Defense: Used in advanced electronic systems for harsh environments, providing durability and performance under extreme conditions.

Silicon Carbide Single Crystal Substrate Packing And Shipping

Silicon Carbide (SiC) Single Crystal Substrate will be securely packaged in sturdy containers with cushioning materials to prevent movement or damage during shipping. This careful packaging ensures that the product arrives in perfect condition, maintaining its high-quality standards throughout the delivery process.

Silicon Carbide Single Crystal Substrate | 6H-SiC/4H-SiC Packing

Where to Buy Silicon Carbide Single Crystal Substrate in Bulk?

Heeger Materials Inc., a professional supplier and manufacturer of high-quality GaN Thin Film Substrate products including Silicon Carbide (SiC) Single Crystal Substrate, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.

Heeger Materials Inc. was established in 2016 in Colorado, USA. We specialize in premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors. 

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