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Silicon Carbide (SiC) Single Crystal...
HM2866
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Silicon Carbide (SiC) Single Crystal Substrate is used in high-power electronics, radio frequency devices, and optoelectronic applications. Heeger Materials is a professional supplier and manufacturer of high-quality Silicon Carbide Single Crystal Substrate, offering customized solutions and competitive prices.
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Density | 3.21 g/cm³ |
Materials | SiC Substrate |
Silicon Carbide (SiC) Single Crystal Substrate is widely used in high-power electronic devices, RF applications, and optoelectronics due to its excellent thermal conductivity, wide bandgap, and high breakdown voltage. 6H-SiC and 4H-SiC differ in their crystal structures, affecting their electrical properties—4H-SiC offers higher electron mobility, making it ideal for high-frequency and power-switching applications, while 6H-SiC provides a balance of electrical and mechanical properties for diverse uses. In addition to standard conductive substrates, we also provide Semi-insulated SiC Substrate and N-type SiC Substrate for specialized applications. Heeger Materials offers high-quality Silicon Carbide Single Crystal Substrate to meet various industrial and research demands.
Growth Method | Seeded Sublimation Method, PVT (Physical Vapor Transport) |
Crystal Structure | Hexagonal |
Lattice Constants | a = 3.08 Å, c = 15.08 Å |
Density | 3.21 g/cm³ |
Orientation | Growth axis or off <0001> by 3.5º |
Bandgap | 3.26 eV (Indirect) |
Hardness | 9.2 (Mohs) |
Thermal Conductivity @300K | 5 W/cm·K |
Dielectric Constant | ε(11) = ε(22) = 9.66, ε(33) = 10.33 |
Dimensions | 10×3mm, 10×5mm, 10×10mm, 15×15mm, 20×15mm, 20×20mm, Dia50.8mm, Dia76.2mm, Dia101.6mm |
Thickness | 0.35mm |
Polishing | Single-side or double-side polished |
Crystal Orientation | <0001> ±0.5º |
Crystal Orientation Accuracy | ±0.5° |
Edge Orientation Accuracy | 2° (Special requirements can be reached within 1°) |
Off-Cut Wafers | Wafers with edges inclined at specific angles (tilt range: 1°–45°) can be customized as required. |
Ra (Surface Roughness) | ≤5Å (5µm×5µm) |
Parameter | Production Grade | Research Grade | Dummy Grade |
Grade | Production | Research | Dummy |
Polytype/Surface Orientation On-axis/Off-axis | 4H/<0001>/0±0.25° | ||
FWHM | ≤45 arcsec | ≤60 arcsec | ≤100 arcsec |
Diameter/Thickness/Notch | 200±0.2mm / 500±25μm / [1-100] ±5° / 1~1.5mm / Ra ≤0.2nm | ||
Resistivity | ≥1E8 Ω•cm | 100% area >1E5 Ω•cm | 70% area >1E5 Ω•cm |
LTV (10mm×10mm) | ≤5μm | ≤10μm | ≤15μm |
TTV | ≤10μm | ≤15μm | ≤20μm |
Bow | -25μm ~ 25μm | -45μm ~ 45μm | -65μm ~ 65μm |
Warp | ≤35μm | ≤50μm | ≤70μm |
Micropipe Density | ≤2 ea/cm² | ≤10 ea/cm² | ≤50 ea/cm² |
Metal Impurities | ≤5E12 atoms/cm² | N/A |
Parameter | Production Grade | ||
Grade | Production | Research | Dummy |
Polytype/Surface Orientation Tolerance | 4H / 4° toward <11-20> ±0.5° | ||
Type/Dopant | N-type / Nitrogen | ||
Diameter/Thickness/Notch | 200±0.2mm / 500±25μm / [1-100] ±5° / 1~1.5mm / Ra ≤0.2nm | ||
Resistivity (Ω·cm) | 0.015~0.025 | 0.01~0.03 | N/A |
LTV (10mm×10mm) | ≤5μm | ≤10μm | ≤15μm |
TTV | ≤10μm | ≤15μm | ≤20μm |
Bow | -25μm ~ 25μm | -45μm ~ 45μm | -65μm ~ 65μm |
Warp | ≤35μm | ≤50μm | ≤70μm |
Micropipe Density | ≤2 ea/cm² | ≤10 ea/cm² | ≤50 ea/cm² |
Metal Impurities | ≤5E12 atoms/cm² | N/A | |
TSD | ≤500 ea/cm² | ≤1000 ea/cm² | N/A |
BPD | ≤2000 ea/cm² | ≤5000 ea/cm² | N/A |
TED | ≤7000 ea/cm² | ≤10000 ea/cm² | N/A |
Silicon Carbide (SiC) Single Crystal Substrate will be securely packaged in sturdy containers with cushioning materials to prevent movement or damage during shipping. This careful packaging ensures that the product arrives in perfect condition, maintaining its high-quality standards throughout the delivery process.
Heeger Materials Inc., a professional supplier and manufacturer of high-quality GaN Thin Film Substrate products including Silicon Carbide (SiC) Single Crystal Substrate, leverages extensive expertise in supply and export to offer competitive prices. We provide customized solutions to meet specific requirements, ensuring exceptional quality and customer satisfaction.
Heeger Materials Inc. was established in 2016 in Colorado, USA. We specialize in premium-grade metals, alloys, ceramics, powders, and other materials catering to research, development, and large-scale industrial production in scientific and industrial sectors.
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