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Copper Sputtering Targets can be used...
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Copper Sputtering Targets can be used in semiconductors, chemical vapor deposition (CVD), physical vapor deposition (PVD) displays, and optical applications. Heeger Materials is a professional supplier and manufacturer of high-quality Copper Sputtering Targets, offering competitive prices and customized solutions to meet specific requirements.
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Shape | Disc/Rectangular/Tube |
Bonding | Unbonding/Bonding |
Symbol | Cu |
Purity | 99.9% - 99.999% |
Since ancient times, copper has been reddish-orange with a melting point of 1,083°C, a density of 8.92 g/cc, and a vapor pressure of 10^-4 Torr at 1,017°C. It forms key alloys like brass and bronze and is an excellent conductor of heat and electricity, found in wires, coins, and electromagnets. In the vacuum industry, copper is crucial for backing plates bonded to sputtering targets and is evaporated to form layers in semiconductors, sensors, and circuit devices.
HM provides high-quality Copper Sputtering Targets at competitive prices for research and industry purposes. We can provide Copper Sputtering Target with different purity, size, and density per your requirements.
Material Type | Copper | Coefficient of Thermal Expansion | 16.5 x 10-6/K |
Symbol | Cu | Theoretical Density (g/cc) | 8.92 |
Atomic Weight | 63.546 | Z Ratio | 0.437 |
Atomic Number | 29 | Sputter | DC |
Color/Appearance | Copper, Metallic | Max Power Density (Watts/Square Inch) | 200* |
Thermal Conductivity | 400 W/m.K | Type of Bond | Indium, Elastomer |
Melting Point (°C) | 1,083 | Comments | Adhesion is poor. Use interlayer (Cr). Evaporates using any source material. |
Circular Sputtering Targets | Diameter | 1.0” 2.0” 3.0” 4.0” 5.0” 6.0” up to 21” |
Rectangular Sputtering Targets | Width x Length | 5” x 12” 5” x 15” 5” x 20” 5” x 22” 6” x 20” |
Thickness | 0.125”, 0.25” |
General requirements such as size, flatness, purity, impurity content, density, N/O/C/S, grain size, and defect control. Special requirements include surface roughness, resistance value, grain size uniformity, composition and tissue uniformity, magnetic conductivity, ultra-high density, ultra-fine grains, etc.
High-purity copper targets are primarily used in display screens, touch screens, protective films, solar energy absorption layers, and semiconductor wiring. The grains of high-purity copper targets are difficult to crush, so we achieve a fine, uniform microstructure through extensive deformation, controlling grain growth. This ensures a lower erosion rate during sputtering and reduces the sensitivity to particle formation in the sputtering process.
The Lead time of the Copper Sputtering Target is 2-5 weeks. It will be packaged in a vacuum-sealed plastic bag with a moisture barrier. The MSDS and COA will be packed with the product.
Heeger Materials specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Other magnetron sputtering targets, evaporation sources, and deposition materials are listed by material throughout the website.
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