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Ion Implantation Components

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Ion Implantation is an important process that is widely used in semiconductor device fabrication, metal finishing, and materials science research. The components of ion implantation are often made of TZM, molybdenum, and tungsten because these materials can perform well in harsh environments. Heeger Materials offers the best Ion Implantation Components at high quality and competitive prices.

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Data sheet

Shapecustomized
MaterialsW, Mo, TZM, Refractory Metals

More info

Ion implantation is a method of accelerating and embedding impurity ions into semiconductor wafers to change their electrical properties and form the desired device structures. 

Ion Implantation ComponentsIon Implantation Components

Ion Implantation ComponentsIon Implantation Components

Ion Implantation Components Features

Material Compatibility

Ion implantation components are crafted from materials with high purity, excellent thermal conductivity, and resistance to harsh environments.

Precision Design

Components are meticulously engineered to ensure accurate beam alignment, uniform dose distribution, and minimal scattering effects.

Wear Resistance

Ion implantation components are coated or treated to enhance wear resistance and minimize particle generation, prolonging their operational lifespan.

Temperature Control

Efficient heat dissipation methods are integrated to maintain temperature stability during ion implantation processes, ensuring consistent results.

Customization

Ion implantation components are designed to match specific equipment configurations, implantation parameters, and semiconductor device requirements.

Ion Implantation Components Processing Accuracy Parameters

Main Materials

 Processing Range

 Dimensional Accuracy (mm)

 Shape Accuracy (mm)

 Position Accuracy (mm)

 Finish (Ra, μm)

W、Mo、TZM

0.00-5.00

±0.003

0.01

0.005

0.2-0.4

W、Mo、TZM

5.01-15.00

±0.005

0.015

0.006

0.4

W、Mo、TZM

15.01-30

±0.008

0.02

0.007

0.4

W、Mo、TZM

30.01-100

±0.010

0.025

0.008

0.6

W、Mo、TZM

> 100

±0.0127

0.030

0.010

0.6

Ion Implantation Components Applications

  • Used to manufacture semiconductors.
  • Used in metal finishing for tool steel toughening and surface finishing.
  • Used in ion beam mixing to achieve graded interface and strengthen adhesion between immiscible material.

Ion Implantation Components Packing

Ion Implantation Components will be carefully packaged with foam padding in a carton, wooden box, or customized package to ensure minimal damage during transportation.

Ion Implantation Components PackingIon Implantation Components Packing

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