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Ion Implantation is an important...
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Ion Implantation is an important process that is widely used in semiconductor device fabrication, metal finishing, and materials science research. The components of ion implantation are often made of TZM, molybdenum, and tungsten because these materials can perform well in harsh environments. Heeger Materials offers the best Ion Implantation Components at high quality and competitive prices.
In Stock
Warning: Last items in stock!
Availability date: 03/01/2013
Shape | customized |
Materials | W, Mo, TZM, Refractory Metals |
Ion implantation is a method of accelerating and embedding impurity ions into semiconductor wafers to change their electrical properties and form the desired device structures.
Material Compatibility | Ion implantation components are crafted from materials with high purity, excellent thermal conductivity, and resistance to harsh environments. |
Precision Design | Components are meticulously engineered to ensure accurate beam alignment, uniform dose distribution, and minimal scattering effects. |
Wear Resistance | Ion implantation components are coated or treated to enhance wear resistance and minimize particle generation, prolonging their operational lifespan. |
Temperature Control | Efficient heat dissipation methods are integrated to maintain temperature stability during ion implantation processes, ensuring consistent results. |
Customization | Ion implantation components are designed to match specific equipment configurations, implantation parameters, and semiconductor device requirements. |
Main Materials | Processing Range | Dimensional Accuracy (mm) | Shape Accuracy (mm) | Position Accuracy (mm) | Finish (Ra, μm) |
W、Mo、TZM | 0.00-5.00 | ±0.003 | 0.01 | 0.005 | 0.2-0.4 |
W、Mo、TZM | 5.01-15.00 | ±0.005 | 0.015 | 0.006 | 0.4 |
W、Mo、TZM | 15.01-30 | ±0.008 | 0.02 | 0.007 | 0.4 |
W、Mo、TZM | 30.01-100 | ±0.010 | 0.025 | 0.008 | 0.6 |
W、Mo、TZM | > 100 | ±0.0127 | 0.030 | 0.010 | 0.6 |
Ion Implantation Components will be carefully packaged with foam padding in a carton, wooden box, or customized package to ensure minimal damage during transportation.
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